PBN plates are thin, flat components made from pyrolytic boron nitride. They are characterized by their high purity, high thermal conductivity, and excellent electrical insulation properties. PBN plates are commonly used in high-temperature and high-vacuum environments, where their properties make them ideal for applications such as semiconductor processing, vacuum furnace fixtures, and plasma etching.
Property | Value |
---|---|
Thermal conductivity | 25-300 W/mK |
Coefficient of thermal expansion (CTE) | 2.3-2.7 ppm/K |
Density | 1.9-2.1 g/cm³ |
Hardness | 7-9 Mohs |
Maximum service temperature | 1,800-2,200°C |
Dielectric constant | 2.2-3.6 |
Transparency | Transparent in IR |
Chemical stability | Chemically inert |
Refractive index | 1.7-1.9 |